Precision multilayer coating for large high-end mirrors

Magnetron sputter deposition (MSD) has been used for precision multilayer coating of large high-end extreme ultraviolet- (EUV) and X-ray-mirrors. The MS 2000 is equipped with up to six sputter magnetrons, rotatable substrate holder for face down deposition and turning substrate with pre-calculated velocity maps. All mechanical parameters can be precisely adjusted, providing accurate process control and reproducible multilayer deposition. Reflectivity (> 70 %), uniformity (> 99.9 %), and reproducibility (>99.9 %) are presented for Mo/Si/C coatings. Stress control of such multilayer systems is critical.