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  4. Extending VLSI and alternative technology with optical and complementary lithography
 
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2016
Editorial
Title

Extending VLSI and alternative technology with optical and complementary lithography

Title Supplement
Special Section Guest Editorial
Author(s)
Lai, K.
Erdmann, A.  
Journal
Journal of micro/nanolithography, MEMS and MOEMS  
DOI
10.1117/1.JMM.15.2.021201
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Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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