2013
Journal Article
Title

Preface: Special issue: Euromat 2011 - European congress and exhibition on advanced materials and processes: Symposium A53 MEMS/NEMS for sensorial and actorial materials

Author(s)
Lehmhus, D.
Brugger, J.
Muralt, P.
Pané, S.
Ergeneman, O.
Bradley, N.
Dubois, M.-A.
De Rooij, N.
Gupta, N.
Busse, M.
Journal
Conference
Open Access
DOI
Additional full text version
Language
English