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New research and pilot fabrication line combining organic and inorganic processes
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2013
Journal Article
Title
New research and pilot fabrication line combining organic and inorganic processes
Author(s)
Fehse, Karsten
COMEDD
Zakhidov, Alexander
COMEDD
Schedwill, Ines
COMEDD
Vogel, Uwe
COMEDD
Journal
Commercial Micro Manufacturing International : CMM International
Language
English
COMEDD
Keyword(s)
OLED on silicon
CMOS fabrication line