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Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
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2013
Journal Article
Title
Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
Author(s)
Steger, M.
Hartmann, C.
Beckemper, S.
Holtkamp, J.
Gillner, A.
Journal
Journal of Laser Micro/Nanoengineering. Online journal
Open Access
DOI
10.2961/jlmn.2013.03.0005
Language
English
Fraunhofer-Institut für Lasertechnik ILT