Modeling of leakage currents in high-k dielectrics: Three-dimensional approach via kinetic Monte Carlo

We report on a simulation algorithm, based on kinetic Monte Carlo techniques, that allows us to investigate transport through high-permittivity dielectrics. In the example of TiN/ZrO2/TiN capacitor structures, using best-estimate physical parameters, we have identified the dominant transport mechanisms. Comparison with experimental data reveals the transport to be dominated by Poole-Frenkel emission from donorlike trap states at low fields and trap-assisted tunneling at high fields.