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Laser Trimming of Micro Mirror Devices
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2008
Journal Article
Title
Laser Trimming of Micro Mirror Devices
Author(s)
Haenel, J.
Keiper, B.
Bleul, K.
Kaufmann, C.
Bonitz, J.
Journal
Laser-Technik-Journal
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
