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  4. Antireflection of transparent polymers by advanced plasma etching procedures
 
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2007
Journal Article
Title

Antireflection of transparent polymers by advanced plasma etching procedures

Abstract
Self-organized nanostructures that provide antireflection properties grow on PMMA caused by plasma ion etching. A new procedure uses a thin initial layer prior to the etching step. Different types of antireflective structures can now be produced in a shorter time and with fewer limitations on the type of polymer that can be used. The durability of the structured surfaces can be improved by the deposition of additional thin films.
Author(s)
Schulz, U.
Munzert, P.
Leitel, R.
Wendling, I.
Kaiser, N.
Tünnermann, A.
Journal
Optics Express  
Open Access
Link
Link
DOI
10.1364/OE.15.013108
Additional full text version
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Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • antireflection

  • microstructure fabrication

  • deposition and fabrication

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