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Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers
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2007
Journal Article
Title
Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers
Author(s)
Paskaleva, A.
Lemberger, M.
Bauer, A.J.
Journal
Microelectronics reliability
DOI
10.1016/j.microrel.2006.11.018
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
