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Stress induced leakage current mechanism in thin Hf-silicate layers
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2007
Journal Article
Title
Stress induced leakage current mechanism in thin Hf-silicate layers
Author(s)
Paskaleva, A.
Lemberger, M.
Bauer, A.J.
Journal
Applied Physics Letters
DOI
10.1063/1.2420774
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
