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Lock-in infrared microscopy with 1.4. µm resolution by using a solid immersion lens
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2006
Journal Article
Title
Lock-in infrared microscopy with 1.4. µm resolution by using a solid immersion lens
Author(s)
Breitenstein, O.
Altmann, F.
Riediger, T.
Karg, D.
Journal
Electronic device failure analysis : EDFAS
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM
