Discrete dislocation dynamics simulation of thin film plasticity

Here it is illustrated how discrete dislocation dynamics (DDD) simulations can be used to investigate various aspects of the plastic deformation of thin films. The description of polycrystalline fcc metal films which can be found as interconnects in integrated circuits is the main subject. In the first section, the to pic of thin film deformation is introduced via experimental results and basic thin film models. Furthermore, it is outlined why thin films are well suited for DDD simulations. The second section considers aspects of the DDD simulation specific to thin films. In the last section of this chapter results are presented and the thin film specific deformation mechanisms are discussed.