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  4. EuSIC: An information network for innovation and standardization in APC and factory integration
 
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2002
Journal Article
Titel

EuSIC: An information network for innovation and standardization in APC and factory integration

Abstract
The recently established EuSIC Network is a European platform for information exchange and joint development activities open for IC makers, tool suppliers, software companies, and R&D institutions. It is driven by the demand especially of small and medium-sized companies for access to the latest technological trends and the need to enhance attention in international markets. Major fields of EuSIC's activities are information exchange on an international level, contribution to technology planning (ITRS) and standardization taskforces (SEMI), proposal of new standards, initiation of R&D projects and international cooperation. The current fields of activities comprise integrated metrology, APC, factory automation, and control software.
Author(s)
Schneider, C.
Zeitschrift
Future fab international
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Language
English
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Tags
  • semiconductor manufac...

  • process control

  • technology roadmap

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