2002
Journal Article
Title

Nanocomposite resist systems for next-generation lithography

Author(s)
Merhari, L.
Gonsalves, K.E.
Hu, Y.
He, W.
Huang, W.S.
Angelopoulos, M.
Bruenger, W.H.
Dzionk, C.
Torkler, M.
Journal
DOI
Language
English