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Reliability of ultrathin nitrided oxides grown in low- pressure N2O ambient
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2001
Journal Article
Title
Reliability of ultrathin nitrided oxides grown in low- pressure N2O ambient
Author(s)
Beichele, M.
Bauer, A.J.
Ryssel, H.
Journal
Microelectronics reliability
DOI
10.1016/S0026-2714(01)00071-3
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
