Charakterisierung optischer Komponenten für DUV Spektralbereich

For the successful industrial use of excimer lasers, optical components with high overall performance and long-term stability are necessary. Their development is closely related to further optimization of methods for the characterization of the optical properties like absorption, scattering and spectral behaviour in the deep UV spectral range. This contribution gives an overview over the actual activities, with special emphasis on the wavelengths 248 nm and 193 nm, which are of actual industrial relevance.