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Chemically vapor-deposited silicon carbide films for surface protection
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1998
Zeitschriftenaufsatz
Titel
Chemically vapor-deposited silicon carbide films for surface protection
Author(s)
Hoerner, A.
Vierhaus, J.
Burte, E.P.
Zeitschrift
Surface and coatings technology
DOI
10.1016/S0257-8972(97)00605-1
Language
Englisch
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