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Low pressure chemical vapour depostition of tantalum pentoxide thin layers
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1995
Zeitschriftenaufsatz
Titel
Low pressure chemical vapour depostition of tantalum pentoxide thin layers
Author(s)
Burte, E.P.
Rausch, N.
Zeitschrift
Journal of non-crystalline solids
DOI
10.1016/0022-3093(95)00219-7
Language
Englisch
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