Optical surface and morphology inspection techniques.

In this chapter a series of non-contact surface and morphology inspection techniques is presented. The list of roughness measuring methods includes techniques by measuring scattered light with and without angh resolution, the microprofilometry, the interferometrie profilometry and the autofocus method. The list of shape measuring methods contains the optical radar technique, various triangulation methods (laser triangulation, theodolite arrangement, light stripe technique, grating projection technique) and different moire methods. The setups and their applications of shadow moire, projection moire, reflection moire and moire deflectometry are shown. Special attention is paid to the double function of the CCD-chip as reference grating and fringe recording medium. A special CCD-chip modification process for a height resolution enhancement is also presented.