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Technology, simulation and design for 3D integrated heterogeneous sensor systems
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2014
Conference Paper
Title
Technology, simulation and design for 3D integrated heterogeneous sensor systems
Author(s)
Schneider, Peter
Fraunhofer-Institut für Integrierte Schaltungen IIS
Heinig, Andy
Fraunhofer-Institut für Integrierte Schaltungen IIS
Bayer, Christian
Fraunhofer-Institut für Integrierte Schaltungen IIS
Ramm, Peter
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT
Dal Molin, Renzo
SORIN Group
Fleischer, Maximilian
Siemens AG, Corporate Research and Technologies
Mainwork
11th Annual 3D Architectures for Semiconductor Integration and Packaging Conference, ASIP 2014
Conference
3D Architectures for Semiconductor Integration and Packaging Conference (ASIP) 2014
Language
English
Fraunhofer-Institut für Integrierte Schaltungen IIS
