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Characteristics of fritting contacts utilized for micromachined wafer probe cards
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2000
Journal Article
Title
Characteristics of fritting contacts utilized for micromachined wafer probe cards
Author(s)
Itoh, T.
Suga, T.
Engelmann, G.
Wolf, J.
Ehrmann, O.
Reichl, H.
Journal
Review of scientific instruments
DOI
10.1063/1.1150610
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM