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Reaktive sputtering in roll-to-roll coating machines using rotatable magnetrons
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2014
Conference Paper
Title
Reaktive sputtering in roll-to-roll coating machines using rotatable magnetrons
Author(s)
Fahland, Matthias
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
Vogt, Tobias
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
Dimer, Martin
Von Ardenne
Khvostikova, Olga
Von Ardenne
Mainwork
ICCG 2014, 10th International Conference on Coatings on Glass and Plastics
Conference
International Conference on Coatings on Glass and Plastics (ICCG) 2014
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
Keyword(s)
reactive sputtering
roll-to-roll coating
permeation barrier
aluminium oxide
