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MOEMS - Technology, packaging and optical interconnection
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2001
Conference Paper
Title
MOEMS - Technology, packaging and optical interconnection
Author(s)
Schröder, H.
Scheel, W.
Mainwork
Functional integration of opto-electro-mechanical devices and systems
Conference
Conference "Functional Integration of Opto-Electro-Mechanical Devices and Systems" 2001
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
