Sensitive and flexible light scatter techniques from the VUV to IR regions

Driven by the increasing requirements for optical surfaces, components and systems, scattering techniques for the analysis of optical losses, roughness and defects face novel challenges for high sensitivity and flexibility. In this paper we present set-ups developed at the Fraunhofer Institute in Jena for total scattering (TS) and angle resolved scattering (ARS) measurements from the vacuum ultraviolet (VUV) and deep ultraviolet (DUV) over the visible (VIS) up to the infrared (IR) spectral regions. Extremely high sensitivities down to 0.05 ppm have been achieved for TS measurements and a dynamic range of up to 15 orders of magnitude for ARS. The performance is demonstrated by examples for roughness analysis of smooth surfaces and scatter analysis of multilayer coatings and diamond-turned mirrors.