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  4. Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers
 
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2016
Conference Paper
Title

Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers

Other Title
Modellierung der Minoritätsladungsträgerlebensdauer in n-4H-SiC Epitaxieschichten
Abstract
We present an extended model for the simulation of the effective minority carrier lifetime in 4H-SiC epiwafers after optical excitation. This multilayer model uses measured values (doping profile, point defect concentration, capture cross sections for electrons and epilayer thickness) as input parameters. The bulk lifetime and the diffusion constant are calculated from the actual time dependent excess carrier profiles, resulting in more realistic transients having different decay regimes than in other models. This enables a better understanding of optical lifetime measurements.
Author(s)
Kaminzky, Daniel
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Kallinger, Birgit  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Berwian, Patrick  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Rommel, Mathias  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Friedrich, Jochen  
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Mainwork
Silicon Carbide and Related Materials 2015  
Project(s)
SiC-WinS
Funder
Bayerische Forschungsstiftung BFS  
Conference
International Conference on Silicon Carbide and Related Materials (ICSCRM) 2015  
Open Access
File(s)
Download (366 KB)
DOI
10.24406/publica-r-391463
10.4028/www.scientific.net/MSF.858.341
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • 4H-SiC

  • m-PCD

  • carrier lifetime

  • Z1/2-defect

  • surface recombination

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