2008
Poster
Title

Electrical AFM techniques for the advanced characterization of materials in semiconductor technology

Title Supplement
Poster at NanoScale VI, Berlin, Germany, July 9-11, 2008
Author(s)
Yanev, V.
Rommel, Mathias  orcid-logo
Spoldi, G.
Beuer, Susanne  orcid-logo
Amon, B.
Petersen, S.
Lugstein, A.
Steiger, A.
Bauer, A.J.
Ryssel, H.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)