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  4. Direct fabrication of periodic structures on surfaces. Laser interference patterning as new scalable industrial tool
 
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2011
Journal Article
Title

Direct fabrication of periodic structures on surfaces. Laser interference patterning as new scalable industrial tool

Other Title
Direkte Herstellung von periodischen Strukturen auf Oberflächen. Laser Interferenz-Mustererzeugung durch ein neues industrielles Werkzeug
Abstract
This report introduces a recently development method for the direct fabrication of 2D and 3D structures. The technique involves the modulation of the laser beam intensity by generating interference pattering. By using high power lasers it is possible to directly modify the materials surface obtaining micro- and submicrometer periodic arrays with controlled spatial modulation. Some examples of fabricated structures on metals, polymers well as ta-C layer are discussed.
Author(s)
Lasagni, A.F.
Bieda, M.
Roch, T.
Langheinrich, D.
Journal
Laser-Technik-Journal  
DOI
10.1002/latj.201090109
Additional link
Full text
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • Interferenz

  • Lasertechnologie

  • array

  • Modulation

  • Mikrolithographie

  • Nanolithographie

  • Metallsubstrat

  • Tantalcarbid

  • Reibungskoeffizient

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