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mTest - A new approach to measure material properties from microscopic specimens
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2001
Conference Paper
Title
mTest - A new approach to measure material properties from microscopic specimens
Author(s)
Vogel, D.
Gollhardt, A.
Walter, H.
Dudek, R.
Kühnert, R.
Michel, B.
Mainwork
Polytronic 2001, International Conference on Polymers and Adhesives in Microelectronics and Photonics. Proceedings
Conference
International Conference on Polymers and Adhesives in Microelectronics and Photonics (Polytronic) 2001
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
