2016
Presentation
Title

Incoming control of silicon wafers - detection and rating of micro-cracks

Title Supplement
Presentation held at 12. Workshop "SiliconFOREST" 2016, Falkau, Germany, 14.02.2016-17.02.2016
Author(s)
Demant, Matthias  
Welschehold, T.
Oswald, M.
Bartsch, Sebastian
Schönfelder, S.
Rein, Stefan  
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)