Options
2021
Master Thesis
Title
Acquisition Time Reduction in Large-Area, High-Resolution Scanning Electron Microscopy-Analysis of Nanometer Integrated Circuits Through Deep Learning-Based Super Resolution
Thesis Note
Karlsruhe, Inst. für Technologie (KIT), Master Thesis, 2021
Person Involved
Gengenbach, Ulrich
Institute for Automation and Applied Informatics, Karlsruhe Institute of Technology, Karlsruhe, Germany
Publishing Place
Karlsruhe