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Evaluation of aluminum contamination on large-diameter wafers in ULSI fabrication
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2003
Conference Paper
Title
Evaluation of aluminum contamination on large-diameter wafers in ULSI fabrication
Author(s)
Nutsch, A.
Shimizu, H.
Englmüller, A.
Fabry, L.
Mainwork
IEEE International Symposium on Semiconductor Manufacturing 2003. Conference proceedings
Conference
International Symposium on Semiconductor Manufacturing (ISSM) 2003
DOI
10.1109/ISSM.2003.1243271
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
