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High-rate sputtering of thick PZT layers for MEMS actuators
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2006
Conference Paper
Title
High-rate sputtering of thick PZT layers for MEMS actuators
Author(s)
Jacobsen, H.
Quenzer, H.-J.
Wagner, B.
Ortner, K.
Jung, T.
Mainwork
MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems. Technical digest
Conference
International Conference on Micro Electro Mechanical Systems (MEMS) 2006
DOI
10.1109/MEMSYS.2006.1627774
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
