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Virtual measurements and simulation of interference microscopes
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2006
Conference Paper
Title
Virtual measurements and simulation of interference microscopes
Author(s)
Koerfer, Friedel
Scheermesser, Sandra
Mainwork
Metrology, inspection, and process control for microlithography XX
Conference
Conference "Metrology, Inspection, and Process Control for Microlithography" 2006
DOI
10.1117/12.656330
Language
English
Fraunhofer-Institut für Produktionstechnologie IPT
