Integration of real factory variability in AMHS simulations for wafer fabs

Most of the existing simulations in the area of semiconductor manufacturing are based on feeding rate approaches. Here, exponential distributions are mainly used for fast simulation results. The drawback is that exponential distributions often do not reflect real production conditions well enough. This paper describes results based on other standard types of distributions and on a new scripted move approach, which allows more realistic simulation results. The paper compares the results based on data from AMD's Fab 30.