Defect-oriented experiments in fault modelling and fault simulation of microsystem components

Based on fault simulation experiments with two microsystems, a resonant silicon beam force sensor and a miniature opto-electric transformer, this paper demonstrates the necessity to consider the interrelations between nominal system models, fault models, the construction of simulation models being capable of injecting faults, and the representation of faults in a fault list of a fault simulator from the very beginning. Some suggestions will be discussed how to tackle these problems occurring in fault modelling and fault simulation of microsystems.