Plasma hydrogen passivation for crystalline silicon thin-films

This paper presents the beneficial effects of Remote Plasma Hydrogen passivation (RPHP) on Recrystallized Wafer-Equivalent (RexWE) solar cells. We varied the dominating parameters of the RPHP process and analysed their effect on the RexWE solar cell parameters. A low and a high temperature regime were investigated for the RPHP. Both showed remarkable results in terms of Voc, FF, Jsc and boosts. The striking benefit of a newly optimised hydrogenation process increased the Voc from 454 to 54 mV and the efficiency from 4.0 to 6.0% by means of a 45 min process at 450°C.