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Laser-induced fluorescence and emission spectroscopic study of magnetic field effects in a low-pressure etch plasma
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1991
Journal Article
Title
Laser-induced fluorescence and emission spectroscopic study of magnetic field effects in a low-pressure etch plasma
Author(s)
Hoffmann, P.
Heinrich, F.
Journal
Journal of applied physics
DOI
10.1063/1.351397
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT