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  4. Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering
 
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2002
Journal Article
Title

Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering

Abstract
We present a method for extending the capabilities of scanning probe microscopy (SPM) methods in surface engineering by specific processing and interpretation of topographic data. The first part of this processing permits SPM measurements of different scan sizes to be combined with other microtopographical techniques. The result is a comprehensive description of the surface microstructure based on power spectral density functions. The second part consists of the extraction of a small set of characteristic parameters that objectively characterize the statistical properties of the surface and separate different roughness contributions.
Author(s)
Ferre-Borrull, J.
Steinert, J.
Duparre, A.
Journal
Surface and Interface Analysis  
DOI
10.1002/sia.1169
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • scanning force microscopy

  • surface quality

  • thin film

  • roughness analysis

  • white light interferometry

  • surface measurement

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