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  4. Integration of a quantum well laser with AlGaAs/GaAs-HEMT electronics.
 
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1993
Conference Paper
Title

Integration of a quantum well laser with AlGaAs/GaAs-HEMT electronics.

Other Title
Integration eines Quantum Well Lasers mit AlGaAs/GaAs-HEMT Elektronik
Abstract
In this presentation the various technology steps for the monolithic integration of GaAs quantum well lasers with Double Pulse Doped AlGaAs/GaAs/AlGaAs Quantum Well (DPD-QW) E/D HEMT electronics on a single substrate in one process run are described. All layers are grown by molecular beam epitaxy. The laser structure, consisting of three 74 A GaAs quantum wells between two AlGaAs cladding layers, are grown on top of the electronic structure. The laser mesas and contact areas are defined by a combined wet and dry etch process. Apart from the transistor gates which are exposed by electron beam lithography, all lithography steps are performed using contact printing. A two layer metallization is used to interconnect the devices whereby air-bridges are used to connect the laser mesas to the electronics. First results showed laser action of laser diodes of area 3 x 300 qmym at a threshold current of less than 60 mA, as well as the operation of different electronic devices on wafers which hav e been processed in this way. These include a laser diode driver, and an optoelectronic receiver with a MSM photo diode, both devices operating at a data rate of 5 Gbit/sec. These results indicate that the process sequence described is suitable for the integration of laser diodes and HEMT electronics.
Author(s)
Bronner, Wolfgang  
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Hornung, J.
Köhler, Klaus  
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Olander, E.
Wang, Z.-G.
Mainwork
III-V electronic and photonic device fabrication and performance  
Conference
Materials Research Society (Spring Meeting) 1993  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • dry etching

  • HEMT

  • monolithic integration

  • monolithische Integration

  • optoelectronics

  • Optoelektronik

  • QW-laser

  • Trockenätzen

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