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Comparison of the predictions from 3D numerical simulation with temperature distributions measured in Si Czochralski melts under the influence of different magnetic fields
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2001
Journal Article
Title
Comparison of the predictions from 3D numerical simulation with temperature distributions measured in Si Czochralski melts under the influence of different magnetic fields
Author(s)
Vizman, D.
Friedrich, J.
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Müller, G.
Journal
Journal of Crystal Growth
DOI
10.1016/S0022-0248(01)01347-1
Language
English
IIS-B
Keyword(s)
computer simulation
convection
magnetic field
Czochralski method
semiconducting silicon