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  4. Comparison of the predictions from 3D numerical simulation with temperature distributions measured in Si Czochralski melts under the influence of different magnetic fields
 
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2001
Journal Article
Title

Comparison of the predictions from 3D numerical simulation with temperature distributions measured in Si Czochralski melts under the influence of different magnetic fields

Author(s)
Vizman, D.
Friedrich, J.  
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Müller, G.
Journal
Journal of Crystal Growth  
DOI
10.1016/S0022-0248(01)01347-1
Language
English
IIS-B  
Keyword(s)
  • computer simulation

  • convection

  • magnetic field

  • Czochralski method

  • semiconducting silicon

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