Investigation of boron redistribution during silicidation in TiSi2 using atom probe tomography

Atom probe Tomography (APT) is based on the field evaporation of ions from a sharp needlelike specimen. A position sensitive detector provides the spatial information of the ion hits, while, the elemental information is obtained by measuring the time of flight of these ionized atoms. The reconstruction of the analyzed tip shows the three dimensional position and the chemical identity of every detected ion.