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Application of electron tomography for semiconductor device analysis
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2006
Journal Article
Title
Application of electron tomography for semiconductor device analysis
Author(s)
Kübel, C.
Lee, T.-C.
Su, D.
Luo, J.-S.
Lo, H.-M.
Russell, J.
Journal
Microscopy and microanalysis
DOI
10.1017/S1431927606065068
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Language
English
Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM
