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ONO structures investigated by SIMS, RBS, and NRA
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1992
Journal Article
Title
ONO structures investigated by SIMS, RBS, and NRA
Author(s)
Ramm, P.
Iberl, F.
Lang, W.
Journal
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
Conference
International Conference on Ion Beam Analysis 1991
Language
English
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