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  4. Performance of 4H-SiC Bipolar Diodes as Temperature Sensor at Low Temperatures
 
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2019
Conference Paper
Title

Performance of 4H-SiC Bipolar Diodes as Temperature Sensor at Low Temperatures

Abstract
In this paper we report on the performance of 4H-SiC bipolar diodes as temperature sensors far beyond 273K. The sensor is measured from 150K to 445K covering a temperature range of 295K. In this operating temperature range, the sensor characteristic VD-T is highly linear and it is dominated by the typical dependence of the p-i-n diode voltage on the temperature. The sensor sensitivity is -4.48mV/K for a diode current of 2nA with a maximum error of 4.3K across the full temperature range. Although 4H-SiC p-i-n are mainly focused on very high temperature applications, our analysis on the performance of bipolar diodes at low temperatures highlights its feasibility as temperature sensor for aerospace and high altitude applications where cryogenic temperatures are achieved.
Author(s)
Benedetto, L. di
Department of Industrial Engineering (DIIn), University of Salerno
Matthus, C.D.
Friedrich-Alexander University of Erlangen-Nuremberg
Erlbacher, T.  
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Bauer, A.J.
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Licciardo, G.D.
Department of Industrial Engineering (DIIn), University of Salerno
Rubino, A.
Department of Industrial Engineering (DIIn), University of Salerno
Frey, L.
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Mainwork
Silicon Carbide and Related Materials 2018  
Conference
European Conference on Silicon Carbide and Related Materials (ECSCRM) 2018  
DOI
10.4028/www.scientific.net/MSF.963.572
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • 4H-SiC electron device sensors

  • temperature sensor

  • semiconductor device modeling

  • thermal-electrical characterization

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