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  4. DTIP 2015, 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
 
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2015
Conference Proceeding
Title

DTIP 2015, 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Title Supplement
27 - 30 April 2015, Montpellier, France
Person Involved
Benoit, Charlot
IES, University of Montpellier, France
Mita, Yoshio
University of Tokyo, Japan
Nouet, Pascal
LIRMM, University of Montpellier, France
Pressecq, Francis
CNES, France
Schröpfer, Gerold
Conventor, France
Rencz, Marta
BME, Hungary
Schneider, Peter  
Fraunhofer-Institut für Integrierte Schaltungen IIS  
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
IEEE Components, Packaging, and Manufacturing Technology Society
Publisher
IEEE  
Publishing Place
Piscataway, NJ
Conference
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2015  
Language
English
Fraunhofer-Institut für Integrierte Schaltungen IIS  
Keyword(s)
  • modeling

  • smart systems

  • manufacturing

  • MEMS

  • RF devices

  • simulation

  • integrated process

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