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1996
Conference Paper
Title
Influence of MOVPE growth conditions and substrate parameters on the structural quality of multi-period InGaAsP/InP MQW structures
Abstract
In this work we have investigated the MOVPE growth of multi-period InGaAsP/InP quantum confined Stark effect (QCSE) layer structures and provide evidence that the QCSE response can be influenced by optimizing the gas exchange procedure, mainly to minimize carry-over effects. Secondly, we present new results on the thermal stability behaviour of these MQW structures which appear to be strongly related with the underlying buffer layer and substrate material.
Keyword(s)
gallium arsenide
iii-v semiconductors
indium compounds
optical waveguides
quantum confined stark effect
semiconductor growth
semiconductor quantum wells
substrates
thermal stability
vapour phase epitaxial growth
movpe growth conditions
substrate parameters
structural quality
multi-period InGaAsP/InP mqw structures
gas exchange procedure
carry-over effects
mqw structures
buffer layer
InGaAsP-InP