Nondestructive investigation on new materials and electronics by microfocal radiography and high resolution X-ray computed tomography

This contribution discusses the microfocal X-ray technique and the high resolution X-ray computed tomography. By the projection technique a direct magnification of structural details is obtained. This paper presents a tomographic unit with a resolution capability in the order of 10 mym. The unit operates with a micro focal X-ray tube as source and two different detection systems. The sample is rotated in the fan beam during the investigation. Results of investigations on ceramics and electronics using micro focal radiography and high resolution X-ray tomography are presented.