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  4. HF-release of sacrificial layers in CMOS-integrated MOEMS structures
 
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2016
Journal Article
Title

HF-release of sacrificial layers in CMOS-integrated MOEMS structures

Abstract
In this paper we will present details of the release process of SiO2 sacrificial layers we use within a multi-level MOEMS process developed by IPMS. Using such sacrificial layers gain a lot of benefits necessary for the production of high-end MOEMS devices like high surface quality and great surface planarity. However the HF-release of the sacrificial layer can be connected with specific issues. We present, which mechanisms are involved in the release process and how knowing them, can be the key for an optimized performance of the device. More-over we will present how to protect the CMOS backplane of our devices from unwanted HF attack during the release.
Author(s)
Döring, Sebastian  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Friedrichs, Martin  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Pufe, Wolfram  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Schulze, Matthias  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Journal
Journal of physics. Conference series  
Conference
Micromechanics and Microsystems Europe Workshop (MME) 2016  
Open Access
File(s)
Download (1.23 MB)
Rights
CC BY 4.0: Creative Commons Attribution
DOI
10.24406/publica-r-245592
10.1088/1742-6596/757/1/012004
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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