• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems
 
  • Details
  • Full
Options
2016
Conference Paper
Title

Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems

Abstract
In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrated in MEMS. The fabrication technology is demonstrated in detail. Moreover, a first application in form of a MEMS test stage for SWCNT strain and reliability experiments is shown.
Author(s)
Bonitz, Jens  
Böttger, Simon
Herrmann, S.
Schulz, Stefan E.  
Geßner, Thomas  
Hartmann, Susanne
Wunderle, Bernhard  
Mainwork
IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016  
Conference
International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)  
DOI
10.1109/NEMS.2016.7758322
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024