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  4. Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing
 
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2012
Conference Paper
Titel

Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing

Abstract
We present an immersion hybrid optics specially designed for focusing ultrashort laser pulses into a polymer for direct laser writing via two-photon polymerization. The hybrid optics enables well corrected focusing over a working distance range of 577 ?m with a numerical aperture (NA) of 1.33 thereby causing low internal dispersion. We combine the concepts of an aplanatic solid immersion lens (ASIL) for achieving a high NA with the correction of aberrations with a diffractive optical element (DOE). To demonstrate the improvements for volume structuring of the polymer, we compare achievable feature sizes of structures written with our optics and a commercial available oil immersion objective (100x, NA=1.4).
Author(s)
Burmeister, Frank
Zeitner, Uwe D.
Nolte, Stefan
Tünnermann, Andreas
Hauptwerk
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
Konferenz
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" 2012
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DOI
10.1117/12.908555
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Tags
  • two-photon polymeriza...

  • refractive/diffractiv...

  • ultrashort laser puls...

  • refractive index mism...

  • aberration correction...

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